Subject


EUV


2025-10-03

[News] TSMC’s EUV Program Cuts Peak Power 44%, Projected to Save US$22.4M by 2030

As noted by Tom’s Hardware, TSMC, the world’s largest foundry, consumes about 9% of Taiwan’s total electricity. To help curb this demand, the company has collaborated with suppliers on the “EUV Dynamic Energy Saving Program.” A pilot run showed the initiative can cut an EUV tool’s annual...

2025-10-02

[News] Intel Rumored to Purchase more ASML High-NA EUV Equipment

As per TechNews, citing Wccftech, Intel will raise its order of High-NA EUV (High Numerical Aperture Extreme Ultraviolet) lithography machines from ASML in the Netherlands from one unit to two recently, underscoring the company’s strong commitment to its 14A process node. As semiconductor proce...

2025-10-01

[News] imec Achieves Single-Patterning High-NA EUV Milestones, Appoints New CEO to Sharpen AI Focus

According to its press release, imec announced a leadership transition, appointing Patrick Vandenameele as its next CEO effective April 2026, while sharpening its focus on the rising demands of AI chipmaking. At the same time, the institute reported breakthroughs in single-patterning High-NA EUV lit...

2025-09-25

[News] SK hynix Reportedly Doubling EUV Fleet by 2027, Potentially Set to Rank Third Globally

According to ETNews, sources say SK hynix intends to add about 20 EUV systems by 2027. The company reportedly has around 20 units, including some used for R&D, and the planned expansion could double that number within two years. With each system costing hundreds of billions of KRW, the total inv...

2025-09-22

[News] Researchers Propose “Beyond EUV” Using Soft X-Rays, Potentially Challenging High-NA EUV

According to Tom’s Hardware, citing Cosmos, Johns Hopkins University researchers have proposed “beyond-EUV (B-EUV),” a step beyond today’s industry-standard EUV lithography. The method employs 6.5–6.7nm soft X-ray lasers, which the report notes could enable resolutions down to 5nm and belo...

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