Subject


Lithography


2025-11-06

[News] Japan Ramps Up Photoresist Investment for 2nm Chips — Tokyo Ohka Kogyo, JSR Lead the Charge

As the global foundry race moves toward the 2nm era, Japan’s chip material makers are ramping up investment to secure their position at the heart of advanced manufacturing. According to Nikkei, major Japanese chip material companies have recently announced new investment plans, including Tokyo Ohk...

2025-11-03

[News] China Makes Breakthrough in Chip Technology, Paving the Way for Lithography Advancements

Lithography technology remains one of the core driving forces behind the continuous scaling of integrated circuit (IC) manufacturing. Recently, a research team led by Professor Peng Hailin from the College of Chemistry and Molecular Engineering at Peking University, together with collaborators, achi...

2025-10-29

[News] U.S. Startup Substrate Unveils X-Ray Lithography to Rival ASML — Eyes TSMC Next

ASML’s extreme ultraviolet (EUV) lithography tools have long been essential to advanced chip manufacturing, with foundries such as TSMC, Samsung, and Intel investing heavily to acquire them. Now, a U.S. startup is looking to challenge the Dutch company’s dominance — and ultimately seek to rep...

2025-10-24

[News] China Reportedly Damaged DUV Machine in Reverse-Engineering, Called ASML for Help

As China pushes to localize chipmaking amid U.S. export controls, developing domestic lithography tools has become a top priority — with ASML’s EUV and DUV systems at the center of its ambitions. Recently, China has reportedly intensified efforts to study the Dutch giant’s DUV machines. Accord...

2025-10-22

[News] TSMC Reportedly Doubles Lithography Patents From 2016 to 2023, Extending Lead Over Rivals

EUV lithography has become the cornerstone of advanced chip manufacturing, and as the foundry race intensifies at ever-smaller nodes, major players are accelerating the development of related technologies. According to Nikkei XTECH, TSMC has significantly ramped up its patent filings in semiconducto...

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