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The linear motor is a core component of the motion platform in a lithography machine. Lithography machine must “carve” circuit patterns onto silicon wafers with nanometer-level precision. The linear motor directly drives the worktable and the mask stage to achieve high-speed, ultra-precise linear motion. Its performance determines the positioning accuracy and motion stability.
As chip manufacturing enters the nanometer era, the traditional method of using rotary motors combined with transmission mechanisms can no longer meet the precision and speed demands. Due to their advantages—direct drive, no mechanical loss, fast response, and high precision—linear motors have become the only viable choice. However, high-end lithography machine linear motor technology has an extremely high entry barrier, and China’s domestic market has long relied heavily on imports.
Recently, key components developed in-house by Henan Oriental Materials, including linear motors, light sources, optical fibers, and magnetic mounts for lithography machines, have officially passed the stringent certifications of SMIC (Semiconductor Manufacturing International Corporation).
Founded in 2018, Oriental Materials is committed to becoming a one-stop service platform for materials and equipment components used in high-end integrated circuit manufacturing. Its business spans three major segments: core semiconductor materials, semiconductor equipment, and key components. The company produces and sells products such as sputtering targets, reaction chambers, and other semiconductor parts.
As a Chinese nationally recognized “Little Giant” enterprise specializing in advanced and innovative technologies, Oriental Materials successfully delivered its high-end self-developed semiconductor equipment in March this year, with six 12-inch wafer manufacturing machines shipped to leading industry players.
Notably, Oriental Materials also plans to invest in building a Southwest Headquarters Project for semiconductor equipment in Chongqing. This project was signed on July 28, with a total planned investment of CNY 1.5 billion and will be constructed in two phases: Phase I will establish a semiconductor equipment production base and an advanced memory chip research institute; Phase II will expand production and build a radio-frequency (RF) chip production line. Construction is scheduled to begin in 2025, with production starting in 2026, targeting an annual output value of CNY 200 million in the first year, and CNY 1.2 billion by 2029.
(Photo credit: FREEPIK)
