Subject


Lithography


2025-10-22

[News] TSMC Reportedly Doubles Lithography Patents From 2016 to 2023, Extending Lead Over Rivals

EUV lithography has become the cornerstone of advanced chip manufacturing, and as the foundry race intensifies at ever-smaller nodes, major players are accelerating the development of related technologies. According to Nikkei XTECH, TSMC has significantly ramped up its patent filings in semiconducto...

2025-10-21

[News] AMIES Rises in China’s Lithography Push, Reportedly Capturing 90% of Domestic Market

At the 2025 SEMiBAY event in China, several companies showcased the nation’s growing semiconductor capabilities, including subsidiaries of Huawei-linked equipment maker SiCarrier. Beyond SiCarrier, another firm drew attention for its advances in lithography. According to South China Morning Post, ...

2025-08-27

[News] Nikon Announces Yokohama Plant Closure as Precision Equipment Business Weakens

On August 21, Nikon announced plans to shut down its Yokohama Plant on September 30. According to Nikkei, the facility employed about 350 people as of the end of July. These employees will remain with the company, relocating to receiving sites as the plant’s operations are transferred to Nikon’s...

2025-08-18

[News] China Unveiled its First Commercial Electron Beam Lithography Machine

On August 13, China’s first domestically developed commercial electron beam lithography machine, Xizhi, was officially unveiled in Yuhang, Zhejiang. According to Hangzhou Government Website, this machine is one of the first projects signed at Zhejiang University’s Technology Commercialization...

2025-08-11

[News] China’s Prinano Delivers First Homegrown Nanoimprint Lithography Machine, Challenging Canon

According to Chinese media outlet ICsmart, Chinese company Prinano announced that its first self-developed PL-SR series inkjet step-and-repeat nanoimprint lithography system has successfully passed inspection and been delivered to a Chinese specialty process client. The report states that the sys...

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