Subject


chip equipment


2025-08-08

[News] Oriental Materials’ In-House Core Components of Lithographic Machine Validated by SMIC

The linear motor is a core component of the motion platform in a lithography machine. Lithography machine must “carve” circuit patterns onto silicon wafers with nanometer-level precision. The linear motor directly drives the worktable and the mask stage to achieve high-speed, ultra-precise linea...

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