[News] AMIES Rises in China’s Lithography Push, Reportedly Capturing 90% of Domestic Market

At the 2025 SEMiBAY event in China, several companies showcased the nation’s growing semiconductor capabilities, including subsidiaries of Huawei-linked equipment maker SiCarrier. Beyond SiCarrier, another firm drew attention for its advances in lithography. According to South China Morning Post, AMIES Technology, a newly emerged Chinese lithography equipment maker, unveiled products seen as signaling renewed momentum in China’s push to reduce reliance on Dutch giant ASML.

AMIES, as reported by STAR Market Daily, is a spin-off of Shanghai Micro Electronics Equipment (SMEE), China’s leading state-owned lithography company. While SMEE focuses on developing core front-end tools, AMIES seeks to accelerate the commercialization of its equipment. According to STCN, SMEE’s self-developed 600 series lithography system has entered mass production at the 90nm node and is now developing a 28nm immersion model.

South China Morning Post notes that AMIES showcased a diverse portfolio of products at the event, including compound semiconductor lithography machines, laser annealing systems, advanced inspection tools, and solutions for packaging and wafer bonding.

AMIES Showcases Progress in Lithography and Packaging Equipment

AMIES’s advanced packaging lithography machine, as noted by STAR Market Daily, is designed for high-end chip packaging applications, including AI and advanced smart terminals. It features high resolution, an ultra-large exposure field, and support for highly warped substrates, meeting the requirements of wafer- and panel-level advanced packaging such as Flip Chip, Fan-in, Fan-out WLP/PLP, and 2.5D/3D integration, the report adds.

The company claims its products have gained broad recognition in the industry. As South China Morning Post reports, AMIES said its advanced packaging lithography machine holds a 35 percent share of the global market and around 90 percent in China. In August 2025, according to ITHome, AMIES announced the shipment of its 500th stepper lithography machine.

Other Key Players Advancing China’s Lithography Technology

As part of China’s push for chip self-sufficiency, several firms are racing to develop domestic DUV and EUV lithography systems. According to South China Morning Post, Zetop Technologies — partly owned by SiCarrier and the U.S.-sanctioned Changchun Institute of Optics, Fine Mechanics and Physics under the Chinese Academy of Sciences — counts several leading EUV optics researchers among its shareholders.

In addition, South China Morning Post, citing Financial Times, notes that Shanghai-based Yuliangsheng — in which SiCarrier also holds a stake — has provided a 28nm DUV lithography system to SMIC, China’s largest foundry, for testing in 7nm production.

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(Photo credit: AMIES)